The MEMS device of Figure 10.52 is used to measure the external magnetic field B. A current i =…

The MEMS device of Figure 10.52 is used to measure the external magnetic field B. A current i = 0.005 sin(60t) A passes through the circular-loop electrical circuit of radius r = 160 nm, which is printed on a rigid plate of thickness  = 10 nm and mass density t = 6550 kg/m3 attached to a flexible rod of length l = 100 nm, diameter dr = 2 nm, and Young’s modulus E = 150 . The tilting of the rigid plate is monitored optically by a photodiode, which is placed at a distance h = 3 mm from the plate; the incident laser beam angle is a0 = 25°, as in Figure 10.20 and the maximum deviation of the reflected beam is measured to be d = 6 nm. Evaluate the magnetic field B.

 

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